Interlayer dielectrics for semiconductor technologies / by S.P. Murarka, M. Eizenberg and A.K. Sinha

By: Murarka, S.PContributor(s): Eizenberg, M | Sinha, A.KMaterial type: Text

TextLanguage: English Publication details: London: Academic Press, 2003. Description: xiv, 444pISBN: 0125112211Subject(s): Applied physics | Atomic layer | Dielectric films | Microelectronic devicesDDC classification: 621.38152

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Item type	Current library	Call number	Status	Date due	Barcode
Books	PROF. BHUBANESWAR BEHERA CENTRAL LIBRARY	621.38152 MUR/I (Browse shelf(Opens below))	Available		127600

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