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Interlayer dielectrics for semiconductor technologies

Murarka, S.P.

Interlayer dielectrics for semiconductor technologies / by S.P. Murarka, M. Eizenberg and A.K. Sinha - London: Academic Press, 2003. - xiv, 444p.

ISBN: 0125112211

Subjects--Topical Terms:
Applied physics
Atomic layer
Dielectric films
Microelectronic devices

Dewey Class. No.: 621.38152 / MUR/I

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