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Details for:
Interlayer dielectrics for semiconductor technologies
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Interlayer dielectrics for semiconductor technologies
/ by S.P. Murarka, M. Eizenberg and A.K. Sinha
By:
Murarka, S.P
Contributor(s):
Eizenberg, M
|
Sinha, A.K
Material type:
Text
Language:
English
Publication details:
London:
Academic Press,
2003.
Description:
xiv, 444p
ISBN:
0125112211
Subject(s):
Applied physics
|
Atomic layer
|
Dielectric films
|
Microelectronic devices
DDC classification:
621.38152
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PROF. BHUBANESWAR BEHERA CENTRAL LIBRARY
621.38152 MUR/I (
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