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Interlayer dielectrics for semiconductor technologies / by S.P. Murarka, M. Eizenberg and A.K. Sinha

By: Murarka, S.PContributor(s): Eizenberg, M | Sinha, A.KMaterial type: TextTextLanguage: English Publication details: London: Academic Press, 2003. Description: xiv, 444pISBN: 0125112211Subject(s): Applied physics | Atomic layer | Dielectric films | Microelectronic devicesDDC classification: 621.38152
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