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Interlayer dielectrics for semiconductor technologies (Record no. 2854)

MARC details
000 -LEADER
fixed length control field	00623nam a2200217Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field	220516s9999 xx 000 0 und d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number	0125112211
041 ## - LANGUAGE CODE
Language code of text/sound track or separate title	eng
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number	621.38152
Item number	MUR/I
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name	Murarka, S.P.
245 #0 - TITLE STATEMENT
Title	Interlayer dielectrics for semiconductor technologies
Statement of responsibility, etc.	/ by S.P. Murarka, M. Eizenberg and A.K. Sinha
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc.	London:
Name of publisher, distributor, etc.	Academic Press,
Date of publication, distribution, etc.	2003.
300 ## - PHYSICAL DESCRIPTION
Extent	xiv, 444p.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element	Applied physics
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element	Atomic layer
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element	Dielectric films
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element	Microelectronic devices
700 ## - ADDED ENTRY--PERSONAL NAME
Personal name	Eizenberg, M.
700 ## - ADDED ENTRY--PERSONAL NAME
Personal name	Sinha, A.K.
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type	Books

Holdings
Withdrawn status	Lost status	Damaged status	Not for loan	Home library	Current library	Date acquired	Total Checkouts	Full call number	Barcode	Date last seen	Price effective from	Koha item type
				PROF. BHUBANESWAR BEHERA CENTRAL LIBRARY	PROF. BHUBANESWAR BEHERA CENTRAL LIBRARY	16.05.2022		621.38152 MUR/I	127600	16.05.2022	16.05.2022	Books