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Applied Charged Particle Optics / by A. Septier

By: Septier ,AMaterial type: TextTextLanguage: English Publication details: New York : Academic Press , 1980. Description: xvii,392pISBN: 012014574XSubject(s): Electron Beam Lithography | Electron Spectroscopy | Implantation Technology | PhysicsDDC classification: 537.56
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