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Applied Charged Particle Optics

Septier ,A

Applied Charged Particle Optics / by A. Septier - New York : Academic Press , 1980. - xvii,392p.

ISBN: 012014574X

Subjects--Topical Terms:
Electron Beam Lithography
Electron Spectroscopy
Implantation Technology
Physics

Dewey Class. No.: 537.56 / SEP/A

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