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MEMS and MOEMS technology and applications

Rai-Choudhury, P.

MEMS and MOEMS technology and applications / by P. Rai-Choudhury - New Delhi: PHI Learning Pvt.Ltd., 2000. - xi, 520p.

9788120337527


Applied physics
Micromachines
Microsystem
Optical communication

621.381 / RAI/M

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