000			00623nam a2200217Ia 4500
008			220516s9999 xx 000 0 und d
020			_a0125112211
041			_aeng
082			_a621.38152 _bMUR/I
100			_aMurarka, S.P.
245		0	_aInterlayer dielectrics for semiconductor technologies _c / by S.P. Murarka, M. Eizenberg and A.K. Sinha
260			_aLondon: _bAcademic Press, _c2003.
300			_axiv, 444p.
650			_aApplied physics
650			_aAtomic layer
650			_aDielectric films
650			_aMicroelectronic devices
700			_aEizenberg, M.
700			_aSinha, A.K.
942			_cBK
999			_c2854 _d2854