000			00514nam a22001697a 4500
005			20231106111308.0
008			231106b |||||||| |||| 00| 0 eng d
020			_a9783540745587
041			_aeng
082			_a621.3815 _bHUF/I
100			_aHuff, Howard R.
245			_aInto the nano era : Moore's law beyond planar silicon CMOS _c/by Howard R. Huff
260			_aHeidelberg; _bSpringer, _c2009.
300			_axxviii, 343p.
650			_aSemiconductors--Materials _x Silicon--Electric properties
942			_cBK
999			_c22163 _d22163