000 00535nam a22001697a 4500
005 20230703053443.0
008 230703b |||||||| |||| 00| 0 eng d
020 _a3 540 37318 7
041 _aeng
082 _a620.11299
_bBHU/A
100 _aBhushan, B.
245 _aApplied scanning probe methods VI: Characterization
_cby B. Bhushan and S. Kawata
260 _aBerlin
_bSpringer
_c2007
300 _a338p.
650 _aMaterials - microscopy
_aScanning probe microscopy
_aNanotechnology
_aParticles(Nuclear physics)
942 _cBK
999 _c18913
_d18913