TY  - BOOK
AU  - Septier ,A
TI  - Applied Charged Particle Optics 
SN  - 012014574X
U1  - 537.56 
PY  - 1980///
CY  - New York : 
PB  - Academic Press , 
KW  - Electron Beam Lithography
KW  - Electron Spectroscopy
KW  - Implantation Technology
KW  - Physics
ER  -