Septier ,A <br/><br/>
Applied Charged Particle Optics  
/ by A. Septier  
 - New York :   Academic Press ,   1980. 
 - xvii,392p. 
<br/><br/><label>ISBN: </label>012014574X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electron Beam Lithography <br/>Electron Spectroscopy<br/>Implantation Technology <br/>Physics
<br/><br/><label>Dewey Class. No.: </label>537.56  / SEP/A