TY  - BOOK
AU  - Murarka, S.P.
AU  - Eizenberg, M.
AU  - Sinha, A.K.
TI  - Interlayer dielectrics for semiconductor technologies
SN  - 0125112211
U1  - 621.38152 
PY  - 2003///
CY  - London: 
PB  - Academic Press, 
KW  - Applied physics
KW  - Atomic layer
KW  - Dielectric films
KW  - Microelectronic devices
ER  -