Murarka, S.P. <br/><br/>
Interlayer dielectrics for semiconductor technologies 
/ by S.P. Murarka, M. Eizenberg and A.K. Sinha 
 - London:   Academic Press,   2003. 
 - xiv, 444p. 
<br/><br/><label>ISBN: </label>0125112211 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Applied physics<br/>Atomic layer<br/>Dielectric films<br/>Microelectronic devices
<br/><br/><label>Dewey Class. No.: </label>621.38152  / MUR/I