TY  - BOOK
AU  - Rai-Choudhury, P.
TI  - MEMS and MOEMS technology and applications
SN  - 9788120337527
U1  - 621.381 
PY  - 2000///
CY  - New Delhi: 
PB  - PHI Learning Pvt.Ltd., 
KW  - Applied physics
KW  - Micromachines
KW  - Microsystem
KW  - Optical communication
ER  -